產(chǎn)品
- RV系列雙級旋片泵
- E2M系列雙級旋片泵
- nES系列單級旋片泵
- ES系列單級旋片泵
- nXDS系列干式渦旋泵
- nXLi系列干式真空泵
- EDC系列爪式真空泵
- EOSi系列噴油螺桿泵
- EH系列羅茨真空泵
- EDS系列干式螺桿泵
- GXS系列干式螺桿泵
- GV系列爪式真空泵
- T-Station渦輪分子泵小車
- STP系列渦輪分子泵
- Stokes滑閥泵
- Stokes 6羅茨泵
- D-LAB系列隔膜真空泵
- nEXPT系列分子泵站
- nEXT系列渦輪分子泵
- EDP系列化工爪式干泵
- CXS系列化工螺桿真空泵
- CDX系列化工螺桿真空泵
- HT系列油蒸汽擴(kuò)散泵
- iH系列半導(dǎo)體真空干泵
- iXH系列半導(dǎo)體真空泵
- iXL系列半導(dǎo)體真空干泵
- EPX系列半導(dǎo)體真空干泵
- GX系列半導(dǎo)體干式泵
產(chǎn)品詳情
簡單介紹：
STP-iXR2206C Edwards磁懸浮渦輪分子泵其設(shè)計(jì)理念與 STP-iXA2206/iXA3306 系列相同。新的**性轉(zhuǎn)軸設(shè)計(jì)提高了抽取性能，這一集成的產(chǎn)品易于安裝且占地面積小，可作為應(yīng)用工具的一體化解決方案。
STP-iXR2206C Edwards磁懸浮渦輪分子泵可提供業(yè)內(nèi)的性能，機(jī)載控制裝置中包含新的小型電源供給。
詳情介紹：
概述
STP-iXR2206 系列磁懸浮渦輪分子泵可提供業(yè)內(nèi)的性能，機(jī)載控制裝置中包含新的小型電源供給。其設(shè)計(jì)理念與 STP-iXA2206/iXA3306 系列相同。新的**性轉(zhuǎn)軸設(shè)計(jì)提高了抽取性能，這一集成的產(chǎn)品易于安裝且占地面積小，可作為應(yīng)用工具的一體化解決方案。
應(yīng)用
玻璃涂層
太陽能 PVD
工業(yè)濺射
特性與優(yōu)勢
泵和控制器之間不需要連接電纜。
消除了傳統(tǒng)架裝式控制器的安裝空間和成本。
緊湊型設(shè)計(jì)使安裝更加方便，占地面積更小。
與 STP-A1603 配套時(shí)在 8” TMP 同類產(chǎn)品中抽取速度高。
使高氣體流速的功耗降低了 32%。
I/O 遠(yuǎn)程、RS232C、RS485、STP-Link 是標(biāo)配端口。
可選配 Profibus 和 DeviceNet。
在帶有吹掃氣體的條件下
The STP iXA2206C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXA2206C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.
CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXA2206C can be used for a variety of applications including but not limited to:
STP-iXR2206 系列磁懸浮渦輪分子泵可提供業(yè)內(nèi)的性能，機(jī)載控制裝置中包含新的小型電源供給。其設(shè)計(jì)理念與 STP-iXA2206/iXA3306 系列相同。新的**性轉(zhuǎn)軸設(shè)計(jì)提高了抽取性能，這一集成的產(chǎn)品易于安裝且占地面積小，可作為應(yīng)用工具的一體化解決方案。
應(yīng)用
玻璃涂層
太陽能 PVD
工業(yè)濺射
特性與優(yōu)勢
泵和控制器之間不需要連接電纜。
消除了傳統(tǒng)架裝式控制器的安裝空間和成本。
緊湊型設(shè)計(jì)使安裝更加方便，占地面積更小。
與 STP-A1603 配套時(shí)在 8” TMP 同類產(chǎn)品中抽取速度高。
使高氣體流速的功耗降低了 32%。
I/O 遠(yuǎn)程、RS232C、RS485、STP-Link 是標(biāo)配端口。
可選配 Profibus 和 DeviceNet。
數(shù)據(jù)
| 入口法蘭 |
|
ISO250F/VG250/DN250CF(ICF305) |
| 抽取速度 (L/S) | N2 | 2200 |
|
|
Ar | 2000 |
|
|
H2 | 1350 |
| 壓縮比 | N2 | >108 |
|
|
H2 | 1x103 |
| 極限壓力 | Pa | 10-7 |
| 額定速度 | rpm | 36500 |
| 大壓力 | Pa | 266 |
| 大入口壓力 | Pa | 8.3 |
| 大流量：冷卻水 25 °C，BP=1300 lmin-1 | sccm | N2=2000，Ar=1200 (1500) |
| 冷卻水 25 °C，BP=10000 lmin-1 | sccm | N2=3100，Ar=1300 (1700) |
| 冷卻水 35 °C，BP=1300 lmin-1 | sccm | N2=1500，Ar=900 (1200) |
| 冷卻水 35LC，BP=10000 lmin-1 | sccm | N2=2000，Ar=900 (1300) |
| 啟動(dòng)時(shí)間 | ≤10 | |
| 停止時(shí)間 | ≤11 | |
| 噪聲 | dB | <55（額定速度時(shí)） |
| 冷卻方法 |
|
水冷卻 |
| 重量 | kg | 48 |
| IP 保護(hù) |
|
IP54 |
| 環(huán)境溫度范圍 | ℃ | 0 至 40 |
| 存儲溫度范圍 | ℃ | -5 至 55 |
| 輸入電壓 | ACV | 200 至 240 |
| 大輸入功率 | VA | 750 |
| 輸入頻率 | Hz | 50/60±2 |
| 泄漏電流 | mA | 大 2.0 |
| 輸入相位 |
|
單相 |
| 主保險(xiǎn)絲規(guī)格 | A | 8 |
| 電流斷開容量 (AIC) | A | 1500（250V 交流，50/60Hz） |
| 正常操作時(shí)的輸出頻率 | Hz | 大 608 |
Edwards STP iXA2206C 5-axis Magnetic Bearing Turbo-Molecular Pump, Corrosion Resistant Parts,
ISO250F Inlet, Integrated Controller and built in power supply.
Edwards PN YT810Z010.
ISO250F Inlet, Integrated Controller and built in power supply.
Edwards PN YT810Z010.
The STP iXA2206C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXA2206C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.
CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXA2206C can be used for a variety of applications including but not limited to:
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
